Publication | Closed Access
Structure, composition and pitting behavior of sputtered Al, Al&.zbnd;Cr and Al&.zbnd;Ta films
19
Citations
7
References
1993
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsTa FilmsThin Film ProcessingMicrostructureSputtered Al
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