Concepedia

Publication | Open Access

High-power impulse magnetron sputtering of Ti–Si–C thin films from a Ti3SiC2 compound target

DOIFull Paper Access

106

Citations

24

References

2006

Year

Jones Alami, Per Eklund, Jens Emmerlich, O. Wilhelmsson, Ulf Jansson, Hans Högberg, Lars Hultman, Ulf Helmersson
Thin Solid Films

References

YearCitations

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