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Densified SiOF Film Formation for Preventing Water Absorption
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1996
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Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsPreventing Water AbsorptionSiof FilmWater DesorptionWettingWater TreatmentPhysical ChemistryChemistryThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film ProcessingFluorine Source
We confirmed that the density of a SiOF film was decreased by the addition of C 2 F 6 as a fluorine source. Such a decrease in the density had the most significant effect on the water absorptivity. Densities of the films were controlled by increasing O 2 gas mixture ratios. From the TDS measurements of water desorption and the change in dielectric constants which occurred when the film was exposed to atmosphere, we confirmed that the densified films had lower water absorptivity.