Journal of Applied Physics · 1987 · 33 citations · 1 references
EngineeringIndustrial EngineeringManufacturing EngineeringHeat TransferProcess ControlThermal AnalysisHeat Transfer AnalysisHeat Transfer FundamentalsHeat Transfer In ReactorsHeat Transfer ModelingTemperature ControlThermal ManagementControl Algorithm DevelopmentFurnacesHeat Diffusion EquationHeat Equation ModelsHeat Transfer ControlTemperature Control Algorithm Design
In this paper the thermal behavior of a diffusion furnace is studied. The ultimate goal is to achieve control of the wafer temperatures. It is shown how some previous results from the literature on the behavior of wafer temperatures in a diffusion furnace are incomplete and partly erroneous. A control algorithm has been derived which achieves much better wafer-to-wafer uniformity than conventional control.
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