Ferromagnetism in Fe-implanted a-plane ZnO films

Abstract

Fe ions of dose 5×1016cm−2 were implanted at 200keV into a-plane ZnO epitaxial films. The epitaxial quality of the postannealed samples was verified by x-ray diffraction ω-rocking curves and φ scans, whereas x-ray absorption spectroscopy identified the presence of both Fe2+ and Fe3+ ions, as well as changes in their relative concentration during postannealing. Superconducting quantum interference device measurements show that the as-implanted and postannealed films are ferromagnetic at room temperature. The saturation magnetization reduces during annealing possibly due to the decrease in the number of oxygen vacancies.