Review of Scientific Instruments · 1960 · 30 citations · 2 references
EngineeringElectrical EngineeringInstrumentationProcess ControlSensorsControl InstrumentationIndustrial InstrumentationProcess InstrumentationReactor InstrumentationThin-film DepositionDeposition RateDeposition Rate ControlDeposition Rate MeasurementEvaporation RatesFurnace DesignSensingTemperature Control InstrumentationVacuum Deposition
A method for controlling the deposition rate of vacuum deposited films is described. This paper presents details of the rate sensing device and furnace control system. The control system utilizes a saturable-core reactor driven by the output of the rate monitor. This controls the furnace current, thus completing the system. Operation and calibration of the control system is described and experimental results are tabulated.
2
Electron-Bombardment Detection of Noncondensable Molecular Beams
W.E. Quinn, A. Pery, Jessica Baker et al. · Review of Scientific Instruments · 1958 · 24 citations