Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies - Concepedia

Concepedia

Publication | Closed Access

Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies

16

Citations

21

References

2012

Year

Takachika Sakurai, Mayui Noborisaka, Tomoaki Hirako, Akira Shirakura, Tetsuya Suzuki

Surface and Coatings Technology

Materials ScienceDiamond-like CarbonEngineeringGlassy CarbonCarbon-based MaterialSurface RoughnessApplied PhysicsCvd MethodAtmospheric Pressure PlasmaAmorphous SolidPlasma Processing

References

	Year	Citations

Page 1