Publication | Closed Access
NiSi2 on Si(111) I. Effects of substrate cleaning procedure and reconstruction
12
Citations
28
References
1988
Year
Materials ScienceMaterials EngineeringSurface CharacterizationEngineeringSurface AnalysisSurface ScienceApplied PhysicsSiliceneSubstrate Cleaning ProcedureSemiconductor Device FabricationSilicon On Insulator
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