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Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments

EngineeringCoherent Gradient SensingPhysicsMicroscopyOptical PropertiesCalibrationGeometrical OpticApplied PhysicsOptical TestingPhotonic MetrologyUncertainty Propagation AnalysisNanometer Profile MeasurementInstrumentationRotatable DevicesOptical System Analysis