2013 · 95 citations · 0 references
EngineeringElectrical EngineeringOptoelectronicsPhotonicsSemiconductor DevicesIntegrated OpticsIntegrated PhotonicsOptical Communication SystemsPhotonic Integrated CircuitsPhotonic MaterialsSilicon PhotonicsHigh-speed TransmissionIntegrated Optical WaveguidesIntegrated Photonic DevicesIntegrated Waveguide CircuitsSilicon Photonics For CommunicationsSilicon Photonics IntegrationSilicon WafersWaveguide Integration
Recently Silicon Photonics has generated an outstanding interest for integrated optical communications. In this paper we describe a 300mm Silicon Photonics platform designed for 25Gb/s and above applications at the three typical communication wavelengths and compatible with 3D integration. Main process features and device results are described.