Photolithography of amorphous films of (η5-C5H5)2Ti(N3)2 on silicon (111) resulting in TiO2: The mechanism of the photodeposition reaction - Concepedia

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Photolithography of amorphous films of (η5-C5H5)2Ti(N3)2 on silicon (111) resulting in TiO2: The mechanism of the photodeposition reaction

12

Citations

32

References

1993

Year

B. J. Palmer, Anna Becalska, Teresa W.H. Ho, R. H. HILL

Journal of Materials Science

Materials ScienceEngineeringPhotochemistryPhotodeposition ReactionInorganic PhotochemistryAmorphous FilmsSurface ScienceApplied PhysicsPhotocatalysisPhoto-electrochemical CellChemistryThin FilmsSilicon On InsulatorThin Film Processing

References

	Year	Citations

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