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Fabrication of <i>c</i>-oriented HgBa2Ca2Cu3O8+δ superconducting thin films
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1995
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Materials ScienceSuperconducting MaterialHigh-tc SuperconductivityEngineeringPhysicsBismuth-based SuperconductorsHigh-temperature SuperconductivityX-ray DiffractionApplied PhysicsSuperconductivityCondensed Matter PhysicsHigh Tc SuperconductorsThin Film Process TechnologySrtio3 SubstrateThin FilmsRf SputteringThin Film Processing
Superconducting Hg-based cuprate thin films have been fabricated on (100) SrTiO3 substrate using rf sputtering and post-Hg-vapor annealing. These films are dominated by c-axis-oriented Hg-1223 phase as indicated by x-ray diffraction and SQUID measurements. Using four-probe technique, the Tc,onset was found to be 130–132 K and Jc was up to 8.5×104 A/cm2 at 77 K and zero field.