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Characteristics of Al-doped ZnO films annealed at various temperatures for InGaZnO-based thin-film transistors

Materials ScienceAluminium NitrideElectrical EngineeringVarious TemperaturesEngineeringIngazno-based Thin-film TransistorsOxide ElectronicsCompound SemiconductorApplied PhysicsThin FilmsAl-doped Zno FilmsThin Film Processing