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Integration of artificial SrTiO3/BaTiO3 superlattices on Si substrates using a TiN buffer layer by pulsed laser deposition method

Materials ScienceMaterials EngineeringEpitaxial GrowthEngineeringLaser Deposition MethodNanoelectronicsOxide ElectronicsApplied PhysicsPulsed Laser DepositionSemiconductor Device FabricationArtificial Srtio3/batio3 SuperlatticesMicroelectronicsSilicon On InsulatorTin Buffer Layer