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Synthesis and properties of pure and antimony-doped tin dioxide thin films fabricated by sol–gel technique on silicon wafer

Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSilicon WaferSol–gel TechniqueOptoelectronic DevicesThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film Processing