Publication | Closed Access
Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
13
Citations
3
References
1996
Year
Materials ScienceElectrical EngineeringPzt Thin FilmsEngineeringApplied PhysicsThin FilmsChemical DepositionElectrical PropertiesChemical Vapor DepositionThin Film Processing
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