Concepedia

Publication | Closed Access

Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor

DOI

15

Citations

18

References

2000

Year

Jih‐Jen Wu, Kuei‐Hsien Chen, Cheng‐Yen Wen, Li–Chyong Chen, X. J. Guo, H.J. Lo, S.T Lin, Yang Yu, C. W. Wang, E. K. Lin
Diamond and Related Materials

References

YearCitations

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