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Deposition and characterization of NiAl and Ni–Al–N thin films from a NiAl compound target

Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsNial Compound TargetThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingNi–al–n Thin Films