Journal of the Optical Society of Korea · 2003 · 12 citations · 1 references
Natural SciencesBiomedical EngineeringPhysicsBiomedical OpticsBiophotonicsOpticsBiomedical Laser ApplicationsX-ray DetectionX-ray DetectorsX-ray OpticsHigh-resolution ImagingLaser Beam FocusingSiliconSilicon WafersSoft X-ray OpticsX-ray Focusing SystemsX-ray Mirror FabricationX-ray Mirrors
This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (<TEX>${\leq}$</TEX>50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was <TEX>$Si_3N_4$</TEX> windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.
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