Organic patch sensor for electro-optic measurement of electrical signals in integrated circuits

Abstract

A highly sensitive, versatile and low-cost electric field sensor has been developed for measuring internal electrical signals in integrated circuits using an electro-optic sampling technique. This sensor uses an organic nonlinear optical (NLO) polymer coated on thin polyimide films and is directly bonded to the circuit under test without a mirror coating. Electro-optic sampling was conducted using the sensor, and a voltage sensitivity of less than a few tens of millivolts was obtained.