Concepedia
Microelectronic Engineering · 2004 · 52 citations · 33 references
Natural SciencesChemistryMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsPorous MaterialsSupercritical Carbon Dioxide ProcessingSupercritical Fluids
33
Surface infrared spectroscopy
Yves J. Chabal · Surface Science Reports · 1988 · 903 citations
Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
A. Grill, Deborah A. Neumayer · Journal of Applied Physics · 2003 · 687 citations
Natural Sciences, Materials Engineering, Materials Science +17
Deposition of Conformal Copper and Nickel Films from Supercritical Carbon Dioxide
Jason M. Blackburn, David P. Long, Albertina Cabañas et al. · Science · 2001 · 385 citations
Engineering, Materials Engineering, Materials Science +17
Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids
Rajaram A. Pai, Raashina Humayun, Michelle T. Schulberg et al. · Science · 2004 · 272 citations
Natural Sciences, Materials Engineering, Materials Science +13
Reaction of hexamethyldisilazane with silica
Michael L. Hair, W. Hertl · The Journal of Physical Chemistry · 1971 · 173 citations
Natural Sciences, Chemistry, Materials Science +7