Publication | Closed Access
Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering
91
Citations
20
References
1996
Year
Materials EngineeringMagnetismMaterials ScienceEngineeringPhysicsSurface ScienceApplied PhysicsMagnetic Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingReactive Magnetron Sputtering
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