Journal of Applied Physics · 1982 · 18 citations · 3 references
Natural SciencesPhysicsElectromagneticsPlasma PhysicsRadiation PhysicsElectron Beam PhysicsLow-temperature PlasmasPlasma DiagnosticsPlasma FundamentalsPlasma SourcesBeam Deposition PhysicsElectron AcceleratorsElectron Beam GenerationElectron Beam SourcesFaraday CupsFaraday EffectPulsed Electron BeamsPulsed Energization
We report a plasma gun, which generates on a continuous basis, kilowatt electron beam discharges (e.g., 0.4 A at 4 kV) in an ambient pressure 0.1–1 Torr without differential pumping. Gun design characteristics, operating parameters, and measured beam profiles are given. Electron beam generation on a pulsed basis has also been studied. More than 100 A of beam current has been measured with a Faraday cup biased to −100V. A trapped electron beam scheme for achieving efficient deposition of the electron beam energy in a gas medium is described.
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<i>Electronic and Ionic Impact Phenomena</i>
H. S. W. Massey, E. H. S. Burhop, Philip Μ. Morse · Physics Today · 1953 · 1.3K citations
Natural Sciences, Chemistry, Physics +10
<i>An Introduction to Gas Lasers: Population Inversion Mechanisms</i>
Colin S. Willett, D. C. Lorents · Physics Today · 1976 · 125 citations
Natural Sciences, Physics, Optics +11
Plasma annealing of ion implanted semiconductors
N. J. Ianno, J. T. Verdeyen, S. S. Chan et al. · Applied Physics Letters · 1981 · 21 citations