Publication | Closed Access
Effect of N2 flow rate on structure and property of ZrNbAlNx multilayer films deposited by magnetron sputtering
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Citations
33
References
2013
Year
Materials EngineeringMagnetismMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsMagnetron SputteringN2 Flow RateZrnbalnx Multilayer FilmsChemical Vapor DepositionThin Film ProcessingMagnetoresistance
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