Three‐dimensional electron microscopy simulation with the CASINO Monte Carlo software

TLDR

Monte Carlo software is widely used to understand electron microscope capabilities, but realistic applications with complex samples require 3D Monte Carlo tools. This article presents the development of a 3D version of the CASINO Monte Carlo software. The new CASINO version offers a graphical interface, an efficient 3D simulation model with accurate physics, and free access, enabling modeling of backscattered, secondary, transmitted electron signals, absorbed energy, and realistic experimental conditions via scan points and shot noise. The software extends the energy range for SEM and STEM applications. © 2011 Wiley Periodicals, Inc.; SCANNING 33:135–146.

Abstract

Abstract Monte Carlo softwares are widely used to understand the capabilities of electron microscopes. To study more realistic applications with complex samples, 3D Monte Carlo softwares are needed. In this article, the development of the 3D version of CASINO is presented. The software feature a graphical user interface, an efficient (in relation to simulation time and memory use) 3D simulation model, accurate physic models for electron microscopy applications, and it is available freely to the scientific community at this website: www.gel.usherbrooke.ca/casino/index.html . It can be used to model backscattered, secondary, and transmitted electron signals as well as absorbed energy. The software features like scan points and shot noise allow the simulation and study of realistic experimental conditions. This software has an improved energy range for scanning electron microscopy and scanning transmission electron microscopy applications. SCANNING 33:135–146, 2011. © 2011 Wiley Periodicals, Inc.