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Experimental and numerical study of the chemical composition of WSe thin films obtained by pulsed laser deposition in vacuum and in a buffer gas atmosphere

Materials ScienceEngineeringPhysicsWse Thin FilmsChemical CompositionSurface ScienceApplied PhysicsLaser-assisted DepositionThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing