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Homoepitaxial deposition of high-quality thick diamond films: effect of growth parameters

Materials ScienceMaterials EngineeringDiamond-like CarbonHomoepitaxial DepositionEngineeringNanotechnologySurface ScienceApplied PhysicsThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film ProcessingGrowth Parameters