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Improving the electrical and optical properties of DC-sputtered ZnO:Al by thermal post deposition treatments

Materials EngineeringMaterials ScienceElectrical EngineeringOptical MaterialsDc-sputtered ZnoEngineeringAluminium NitrideOptical PropertiesOxide ElectronicsApplied PhysicsPulsed Laser DepositionOptoelectronicsThin Film Processing