Publication | Closed Access
Growth kinetics and oxidation behavior of WSi2 coating formed by chemical vapor deposition of Si on W substrate
59
Citations
21
References
2005
Year
Materials ScienceEngineeringCorrosionOxidation ResistanceSurface ScienceApplied PhysicsSemiconductor Device FabricationW SubstrateChemical DepositionSilicon On InsulatorGrowth KineticsChemical Vapor Deposition
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