Publication | Closed Access
Formation of silicon oxinitride from Si3N4 and SiO2 in the presence of Al2O3
105
Citations
8
References
1984
Year
Materials ScienceMaterials EngineeringEngineeringSilicon OxinitrideSurface ScienceSiliceneCalcium AluminateSemiconductor Device FabricationChemistrySilicon On Insulator
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