Concepedia

Publication | Closed Access

High-resolution microcalorimeter energy-dispersive spectrometer for x-ray microanalysis and particle analysis

DOI

10

Citations

0

References

1998

Year

David A. Wollman, G. C. Hilton, K. D. Irwin, L L Dulcie, Norman F. Bergren, Dale E. Newbury, Keung‐Shan Woo, Benjamin Y. H. Liu, Alain C. Diebold, John M. Martinis

Unknown Venue

Abstract

We have developed a high-resolution microcalorimeter energy-dispersive spectrometer (EDS) at NIST that provides improved x-ray microanalysis of contaminant particles and defects important to the semiconductor industry. Using our microcalorimeter EDS mounted on a scanning electron microscope (SEM), we have analyzed a variety of specific sized particles on Si wafers, including 0.3 μm diameter W particles and 0.1 μm diameter Al2O3 particles. To compare the particle analysis capabilities of microcalorimeter EDS to that of semiconductor EDS and Auger electron spectroscopy (AES), we report measurements of the Al-Kα/Si-Kα x-ray peak intensity ratio for 0.3 μm diameter Al2O3 particles on Si as a function of electron beam energy. We also demonstrate the capability of microcalorimeter EDS for chemical shift measurements.