Surface and Coatings Technology · 1997 · 18 citations · 11 references
EngineeringPhysicsPlasma PhysicsRadiation DosimetryRadiation TransportAbsorbed DoseIon ImplantationPlasma Surface TreatmentRadiation Dose MeasurementDepth Dose DistributionDose Distribution CalculationsDose Distribution MappingPlasma Immersion Ion ImplantationRadial Dose Distribution
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The Bohm criterion and sheath formation
K.‐U. Riemann · Journal of Physics D Applied Physics · 1991 · 1K citations