Effects of negative low self-bias on hydrogenated amorphous carbon films deposited by PECVD technique - Concepedia

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Effects of negative low self-bias on hydrogenated amorphous carbon films deposited by PECVD technique

38

Citations

21

References

2003

Year

T. Girardeau, S. Camelio, Ángel Barranco, D. Vouagner, É. Bréelle

Diamond and Related Materials

Materials ScienceEngineeringCarbon-based MaterialApplied PhysicsNegative Low Self-biasPecvd TechniqueAmorphous SolidAmorphous Carbon FilmsThin Film Processing

References

	Year	Citations

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