Improvement of reproducible resistance switching in polycrystalline tungsten oxide films by <i>in situ</i> oxygen annealing

Abstract

The electric-field-induced resistance switching in polycrystalline tungsten oxide films was investigated. Compared with the as-deposited film, the film annealed in an oxygen atmosphere shows a more stable switching behavior, a higher low-to-high resistance ratio, and a better endurance and retention. Based on the x-ray photoemission spectroscopy analysis, the resistance switching was attributed to the change in the interfacial barrier potential, due to the electron trapping/detrapping in the surface states, and the switching improvement was attributed to the decrease in the surface density of states. The present work suggests a possible approach controlling the resistance switching property by surface modification.