Applied Surface Science · 2003 · 21 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsMaterials ProcessingCeramic ProcessingPlasma Surface TreatmentPlasma-wall InteractionsSize ReductionAtmospheric Pressure Plasma TreatmentFibersLow-pressure Plasma TreatmentPlasma PretreatmentPlasma TreatmentPlasma Treatment Of CeramicsRemoval
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Process control of RF plasma assisted surface cleaning
H. Steffen, Jakob Schwarz, Holger Kersten et al. · Thin Solid Films · 1996 · 26 citations