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Chemical roles of peroxide-based alkaline slurries in chemical–mechanical polishing of Ta: investigation of surface reactions using time-resolved impedance spectroscopy

Materials ScienceChemical EngineeringEngineeringMaterial ProcessingSurface ChemistryCorrosionSurface ScienceSurface EngineeringInterfacial PhenomenaSurface TreatmentTime-resolved Impedance SpectroscopySurface PolishingSurface ProcessingPeroxide-based Alkaline SlurriesChemical–mechanical Polishing