Morphology controlled synthesis of crystalline ZnO film by MOCVD: from hexagon to rhombus

Abstract

We grew crystalline ZnO films by non-catalyst metalorganic chemical vapor deposition. Through adjusting the mass flow rate of the diethylzinc source, the morphology of the crystalline ZnO film can be easily manipulated from hexagon to rhombus. The possible mechanism is the growth rate anisotropy, which is confirmed by FE-SEM, XRD, and TEM measurements.