Influence of the deposition pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering - Concepedia

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Influence of the deposition pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

53

Citations

22

References

2005

Year

Maoshui Lv, Xianwu Xiu, Zhiyong Pang, Ying Dai, Shenghao Han

Applied Surface Science

Materials EngineeringMaterials ScienceZirconium-doped ZincEngineeringOxide ElectronicsApplied PhysicsRf MagnetronThin FilmsChemical DepositionDeposition PressureThin Film Processing

References

	Year	Citations

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