Miniature liquid-crystal-on-silicon display assembly

Abstract

A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-crystal cell gap control <2.5 µm with excellent uniformity (±100 nm) for glass-on-glass and glass-on-silicon assemblies. The resin is compatible with common liquid-crystal alignment films and exhibits a bonding shear strength of 22±3.2 MPa?The assembly process flow and characterization of demonstration devices are described.