Concepedia

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Comparative study between silicon-rich oxide films obtained by LPCVD and PECVD

DOI

48

Citations

8

References

2007

Year

A. Morales–Sánchez, Jorge Barreto, M. Riera, M. Aceves, J. Carrillo
Physica E Low-dimensional Systems and Nanostructures

References

YearCitations

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