Publication | Closed Access
Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition
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Citations
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References
2001
Year
Materials ScienceChemical EngineeringEngineeringCarbon-based MaterialNanomaterialsNanotechnologyApplied PhysicsSilicon SubstratesAligned Carbon NanotubeChemical Vapor DepositionPlasma ProcessingNanolithography Method
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