Publication | Closed Access
Characterisation of silicon carbide films deposited by plasma-enhanced chemical vapour deposition
27
Citations
8
References
2007
Year
Materials ScienceEngineeringPlasma-enhanced Chemical VapourSurface ScienceApplied PhysicsSilicon Carbide FilmsSemiconductor Device FabricationThin FilmsChemical DepositionPlasma ProcessingChemical Vapor DepositionCarbide
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