Deposition and characterization of carbon nitride films from hexamethylenetetramine/N2 by microwave plasma-enhanced chemical vapor deposition - Concepedia

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Deposition and characterization of carbon nitride films from hexamethylenetetramine/N2 by microwave plasma-enhanced chemical vapor deposition

21

Citations

34

References

2004

Year

Md. Nizam Uddin, Osama A. Fouad, Masaaki Yamazato, Masamitsu Nagano

Applied Surface Science

Materials ScienceChemical EngineeringEngineeringSurface ScienceApplied PhysicsCarbon Nitride FilmsChemical Vapor DepositionThin FilmsChemical DepositionGas Discharge PlasmaPlasma Processing

References

	Year	Citations

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