Concepedia

Publication | Closed Access

Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

DOI

79

Citations

10

References

2005

Year

Xiaodong Wang, Baoqing Li, Onofrio Russo, Harry T. Roman, Ken K. Chin, K.R. Farmer
Microelectronics Journal

References

YearCitations

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