Photonic integration using inductively coupled argon plasma enhanced quantum well intermixing

Abstract

The capability of photonic integration using inductively coupled argon plasma enhanced quantum well intermixing (ICP-QWI) was demonstrated by fabricating a broad area extended cavity laser. The differential bandgap shift of 86 nm and the passive waveguide loss of 2.98 cm−1 have been obtained. Results indicate high quality of devices processed using the ICP-QWI technique.