Structural and optical properties of sol-gel-processed BaTiO3 ferroelectric thin films

Abstract

BaTiO3 thin films having a perovskite structure were deposited onto stainless steel and fused quartz substrates by sol-gel processing. Crystalline, transparent, and crack-free films of 5000 Å thickness were fabricated by spinning and post-deposition annealing at a temperature of 600 °C. Ferroelectric properties were confirmed by P-E hysteresis loops. The dielectric constant and optical transmission were also measured.