Concepedia

Publication | Closed Access

Line edge roughness (LER) reduction strategy for SOI waveguides fabrication

DOI

22

Citations

5

References

2008

Year

Stefano Sardo, F. Giacometti, Sergio Doneda, Umberto Colombo, Melissa Di Muri, Anna Donghi, Romano Morson, Giorgio C. Mutinati, Alessandro Nottola, M. Gentili,
Microelectronic Engineering

References

YearCitations

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