Applied Physics Letters · 1969 · 55 citations · 4 references
Natural SciencesMaterials SciencePhysicsAcousticsSurface ScienceAcoustic MeasurementAcoustic Wave PropagationPhase VelocityPhysical AcousticsSurface Wave DynamicsSurface Wave MethodsAcoustic Phase VelocityAcoustic VelocityExperimental Results InterpretationSingle-crystal SemiconductorsSingle-crystal SiliconSurface Acoustic Waves
Acoustic surface wave phase velocities have been measured on (001), (110), and (111) surfaces of single-crystal silicon using the wedge method. Good agreement between the theoretical and experimental results was obtained.
4