Microstructure, oxidation and H2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

Natural Sciences, Materials Engineering, Materials Science +17

On structure and properties of sputtered Ti and Al based hard compound films

O. Knotek, M. Böhmer, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 397 citations

Natural Sciences, Materials Engineering, Materials Science +17

Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

U. Wahlström, Lars Hultman, J.‐E. Sundgren et al. · Thin Solid Films · 1993 · 207 citations

Natural Sciences, Materials Engineering, Materials Science +16

TiN coatings on steel

R. Buhl, H.K. Pulker · Thin Solid Films · 1981 · 204 citations

Natural Sciences, Materials Engineering, Materials Science +12

Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition

L.A. Donohue, I.J. Smith, W.‐D. Münz et al. · Surface and Coatings Technology · 1997 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +12