Microstructure, oxidation and H2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique - Concepedia

Concepedia

Publication | Closed Access

Microstructure, oxidation and H2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique

82

Citations

20

References

2003

Year

Baoyuan Man, L. Guzmàn, A. Miotello, M. Adami

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringCorrosionOxide ElectronicsSurface ScienceApplied PhysicsTialn FilmsChemical DepositionChemical Vapor DepositionH2-permeation ResistanceThin Film Processing

References

	Year	Citations

Page 1