Sensors and Actuators B Chemical · 1992 · 59 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySensorsThin FilmsChemical SensorsGas SensorsOxide SemiconductorsSemiconductor Thin FilmsSensor MaterialsThin-film DepositionMetal Oxide Gas SensorsMetal Oxide Sensor MaterialsSemiconductor Oxide Thin FilmsSensing ApplicationsThin-film Sensor MaterialsThin-film SensorsTin Oxides
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